Zinc Aluminum Oxide Sputtering Target

Zinc Aluminum Oxide Sputtering Target
Product Zinc Aluminum Oxide Sputtering Target (AZO Target)
Part Number SP30-06
CAS Number 1314-13-2 / 1344-28-1
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The typical content of Zinc Aluminum Oxide (AZO, or aluminum doped zinc oxide) is ZnO 98 wt%/ Al2O3 2 wt%. The purity can be up to 99.99% in green color.

ZnO: Al transparent conductive thin films, namely AZO films, are prepared by doping Al into ZnO system. The conductivity of the films is greatly improved and the resistivity can be reduced to 10-4. Moreover, AZO thin films are more stable than ITO films in hydrogen plasma, and have similar photoelectric properties compared with ITO. Furthermore, AZO thin films are easy to prepare, richer in element resources than In. They are non-toxic and gradually become the best substitute for ITO films. AZO thin films have been partially applied in flat panel displays and thin-film solar cells.

NCE can offer the high quality indium tin oxide (ITO), zinc oxide (ZnO), zinc aluminum oxide (AZO), zinc gallium oxide (GZO), zinc indium oxide (IZO) series special test targets for transparent conductive films. Sputtering targets with different sizes available on request. Please contact us for more details. Get a Quote Now! For other sputtering targets, please check our Sputtering Targets catalog page.

Typical Applications:

Thin film solar cell, transparent conductive glass, conductive flexible film, plasma display, etc.

Typical Specification

Material: Zinc oxide (ZnO)/Aluminum Oxide(Al2O3)
Content: 98:2 wt%
Relatively Density: ≥99.5%
Purity: 99.99%
Shape: Discs, plates, step targets, custom work
Typical Dimension: Diameter: 1”, 2”, 3”, 4”; Thickness: 0.125”, 0.2”, 0.25”
Bonding (recommended): Elastomer, Indium

∗ Special requirements are available. Please review the sputtering gun manual to confirm the target shape and size.

Order Information

Inquiries and orders should include the following information:

  1. Quantity
  2. Dimensions or drawings
  3. Bonding service or not (bonding recommended)

Packing and Storage

Standard Packing: Packed in sealed bags with labels. Items will be packed properly to avoid damage during transit.

Storage: Store in dry environment, sealed packages. Handle with care, prevent pressure and collision.

Note:

  1. Before using, observe whether the surface is clean. Wear clean gloves to operate. Avoid direct contact with materials by hand and avoid contamination by oil and other things.
  2. Indium bonding: max. operating temperature 150°C; Elastomer bonding: max. operating temperature 250°C.

Physical Properties

Symbol: AZO
Color: Dark green