Titanium Sputtering Target

Titanium (Ti) is a silvery white metal, characterized by light weight, high strength, metallic luster and resistance to wet chlorine corrosion. However, titanium cannot be used in dry chlorine gas. Even if the temperature is below 0 °C, there will be violent chemical reaction to form titanium tetrachloride, which will be decomposed into titanium dichloride and even burned. Only when the water content of chlorine is higher than 0.5%, titanium can maintain reliable stability in it.

Titanium (Ti) target material is made by melting high purity titanium ingot. It is suitable for sputter coating and widely used in semiconductor chips, MEMS sensors, optoelectronic devices, wide band gap semiconductors, graphene, and other industries.

High-purity titanium is mainly used as semiconductor material and getter material in ultra-high vacuum devices. High purity titanium can be widely used in high vacuum and ultra-high vacuum system because of its gas absorption, especially hydrogen, CH₄ and CO₂. When the line network of LSI, VLSI and ULSI is fabricated by high purity titanium sputtering, these integrated parts will become very light, thin, small size and dense lines. High purity titanium target can also be used as barrier metal material.

NCE can provide the Titanium (Ti) Sputtering Target with different sizes available on request. Please contact us for more details. Get a Quote Now! For other sputtering targets, please check our Sputtering Targets catalog page.

Typical Applications:

Titanium Sputtering Target is widely used in making semiconductor chips, MEMS sensors, optoelectronic devices, wide band gap semiconductors, graphene and other industries.

∗ Custom-work dimensions or special requirements are available.

Inquiries and orders should include the following information:

1. Quantity
2. Dimensions or drawings
3. Purity

Standard Packing: Packed in sealed bags with labels. Items will be packed properly to avoid damage during transit.

Storage: Store in dry environment, sealed packages. Handle with care, prevent pressure and collision.

Note: Before using, observe whether the surface is clean. Wear clean gloves to operate. Avoid direct contact with materials by hand and avoid contamination by oil and other things.