Titanium Dioxide Sputtering Target

Product Titanium Dioxide Sputtering Target (TiO2 Target)
Part Number SP22-04
CAS Number 13463-67-7

The Titanium Dioxide Sputtering Target is made of high quality titanium dioxide (TiO2). Titanium dioxide is a kind of high refractive index material, which is suitable for electron gun evaporation. The film is compact, firm and resistant to chemical corrosion.

The color of titanium dioxide can be white or black. The color difference is mainly due to the production environment. The white titanium dioxide is sintered in the atmosphere, while the black one is sintered in vacuum. In the trial, black titanium dioxide is easier to evaporate than the white one. However, it needs to be filled with oxygen, because titanium dioxide will decompose and lose oxygen when heated and evaporated in vacuum, forming high absorption titanium oxide film. Therefore, it is necessary to add oxygen to the plating process.

Titanium dioxide thin films have high dielectric constant and can be used to make thin film capacitors for hybrid integrated circuits.

NCE can provide the Titanium Dioxide (TiO2) Sputtering Target with different sizes available on request. Please contact us for more details. Get a Quote Now! For other sputtering targets, please check our Sputtering Targets catalog page.

Typical Applications:

The Titanium Dioxide (TiO2) Sputtering Target is widely used for the anti-reflection film, spectroscope, cold light film, filter, high reflection film, and glasses coating.

Titanium Dioxide Sputtering Target Typical Specification

Material: Titanium Dioxide (TiO2)
Purity: 99.95%, 99.99%
Sputter: RF sputtering
Type of Bond: Indium, Elastomer
Shape: Discs, plates, step targets, custom work
Typical Dimension: Diameter: 1”, 2”, 3”, 4”; Thickness: 0.125”, 0.2”, 0.25”

∗ Special requirements are available. Please review the sputtering gun manual to confirm the target shape and size.

Order Information

Inquiries and orders should include the following information:

  1. Quantity
  2. Dimensions or drawings
  3. Bonding service or not. (Bonding recommended)

Packing and Storage

Standard Packing: Packed in sealed bags with labels. Items will be packed properly to avoid damage during transit.

Storage: Store in dry environment, sealed packages. Handle with care, prevent pressure and collision.

Note:

  1. Before using, observe whether the surface is clean. Wear clean gloves to operate. Avoid direct contact with materials by hand and avoid contamination by oil and other things.
  2. Indium bonding: max. operating temperature 150°C; Elastomer bonding: max. operating temperature 250°C.

Physical Properties

Symbol: TiO2
Color: White or black
Melting Point: 1850 °C
Boiling Point: 3200 °C
Density: 4.29 g/cm3
Evaporation Temperature: 2200 °C
Evaporation Mode Electron beam
Transparent Range: 0.36-9 µm
Refractive Index (55 nm): 2.3
Evaporation Source Material: RE, RS