Scandium Oxide Sputtering Target (Sc2O3 Target)

Scandium Oxide Sputtering Target
Product Scandium Oxide Sputtering Target (Sc2O3 Target)
Part Number SP21-1
Purity 99.9%, 99.99%, 99.999%
Density 3.864 g/cm3
CAS# 12060-08-1

Scandium Oxide (Sc2O3) is the raw material for the scandium (Sc) metal, salts (ScCl3, ScF3, ScI3, etc.) and a variety of scandium alloys (Al-Sc, Al-Zr-Sc). Sc2O3 has been widely used in the aluminum alloy, the electric light source, laser, catalyst, activator, ceramics and the aerospace. NCE can provide different purity levels of Sc2O3 Sputtering targets. Get a Quote Now! For other rare earth targets, please check our Rare Earth Targets catalog page.

Typical application:
It is used for the scientific experiments or research applications, micro nano processing, or device manufacturing, etc.
Relevant customized products can be widely used in semiconductor chip, solar photovoltaic, plane display, special coating and other industries.

Typical Specification

Material: Scandium Oxide (Sc2O3)
Purity: 99.9%, 99.99%, 99.999%
Sputter: RF Sputtering (Radio Frequency Sputtering)
Type of Bond: Indium, Elastomer
Shape: Discs, Plates, Step Targets, Custom Work
Typical Dimension: Diameter: 1”, 2”, 3”, 4”; Thickness: 0.125”, 0.2”, 0.25”

* Special requirements are available. Please review the sputtering gun manual to confirm the target shape and size.

Order Information

Inquiries and orders should include the following information:

  1. Quantity
  2. Dimension or Drawing
  3. Bonding Service or not.

Packing and Storage

Standard Packing: Packed in Sealed Bags with labels. Items will be packed properly to avoid damage during transit.

Storage: Store in dry environment, sealed package. Handle with care, prevent pressure and collision.

Note:

  1. Before using, observe whether the surface is clean. Wear clean gloves to operate. Avoid direct contact with materials by hand and avoid contamination by oil and other things.
  2. Indium bonding: Max. operating temperature 150°C. Elastomer bonding: Max. operating temperature 250°C.

Physical Properties – Scandium Oxide Sputtering Target (Sc2O3 Target)

Symbol Sc2O3
Color White
Melting Point 2403°C
Water Solution Insoluble