Pyrolytic Boron Nitride Coating
Product | Pyrolytic Boron Nitride Coating (PBN Coating) |
Part Number | PBN06 |
About Pyrolytic Boron Nitride (PBN) Coating
Graphite is widely used in heating field, but graphite will constantly precipitate impurities under vacuum and high temperature conditions, which will pollute ultrapure materials. With the advantages of no porosity and low thermal expansion coefficient, Pyrolytic Boron Nitride (PBN) is coated on the outer layer of graphite, which can prevent the impurities from precipitated graphite and protect the ultrapure materials from being polluted. The graphite after coating is heated for many times, and the surface of boron nitride is not easy to peel off.
In liquid epitaxy and MOCVD, PBN is used as coating to protect the graphite parts and heater in equipment usually, to avoid the volatilization of graphite in high temperature. In addition, the PBN coating has a very high chemical inertia, so it can be used as a diaphragm or passive film in the process of semiconductor etching.
Features of Pyrolytic Boron Nitride Coating (PBN) coating:
High purity (99.99%)
High insulativity
Low outgassing at high temperature
Coating can combined with substrate tightly, not easy to peel off
High resistivity to chemical corrosion at high temperature
High density and effectively prevent volatilization of substrate
Please contact us for the RFQ if you are looking for the following: PBN coating on graphite and other substrates, or PBN/PG ceramic heater components. Get a Quote Now! For other ceramic materials, please check our Ceramics catalog page.
Pyrolytic Boron Nitride (PBN) Typical Specification
Properties | Units | Values |
Density | g/cm3 | 1.95-2.20 |
Bending Strength | MPa | 173 |
Compression Strength | MPa | 154 |
Thermal Conductivity | W/m°C | “a” 60 “c” 2 |
Resistivity | Ω·cm | 1.7~2×1015 |
Total Impurities | ppm | <100 |
Order Information
Inquiries and orders should include the following information:
- Quantity
- Dimensions or drawings
Packing and Storage
Standard Packing: Sealed bags in carton boxes. Special package is available on request.