PBN/PG Composite Heating Element

PBN/PG Composite Heating Element (Pyrolytic Boron Nitride Heater)
Product PBN/PG Composite Heating Element (PBN Heater)
Part Number PBN10

About PBN/PG Composite Heating Element (PBN Heater)

The PBN/PG Heating Element uses high insulated PBN as the substrate, and in low pressure (<10 Torr), produces conductive PG coating with low pressure thermal decomposition chemical vapor deposition.

Typical Applications:

Semiconductor substrate heater (used in the fields of MBE, MOCVD, Sputter coating, CVC etc.)
Superconductor substrate heating
Electron microscope sample heating
Metal evaporation heating

Features:

Both PBN and PG with stable chemical property
Acid and alkali resistance
Can be made to complicated shape
The temperature can rise up to 1400°C with high speed (vacuum or inert gas)

NCE can provide various PBN/PG Composite Heating Elements as required. Please contact us for more details. Get a Quote Now! For other ceramic materials, please check our Ceramics catalog page.

Pyrolytic Boron Nitride (PBN) Typical Specification

Properties Units Values
Density g/cm3 1.95-2.20
Bending Strength MPa 173
Compression Strength MPa 154
Thermal Conductivity W/m°C “a” 60 “c” 2
Resistivity Ω·cm 1.7~2×1015
Total Impurities ppm <100

Order Information

Inquiries and orders should include the following information:

  1. Quantity
  2. Dimensions or drawings
  3. Resistivity

Packing and Storage

Standard Packing: Sealed bags in carton boxes. Special package is available on request.