PBN/PG Composite Heating Element
Product | PBN/PG Composite Heating Element (PBN Heater) |
Part Number | PBN10 |
About PBN/PG Composite Heating Element (PBN Heater)
The PBN/PG Heating Element uses high insulated PBN as the substrate, and in low pressure (<10 Torr), produces conductive PG coating with low pressure thermal decomposition chemical vapor deposition.
Typical Applications:
Semiconductor substrate heater (used in the fields of MBE, MOCVD, Sputter coating, CVC etc.)
Superconductor substrate heating
Electron microscope sample heating
Metal evaporation heating
Features:
Both PBN and PG with stable chemical property
Acid and alkali resistance
Can be made to complicated shape
The temperature can rise up to 1400°C with high speed (vacuum or inert gas)
NCE can provide various PBN/PG Composite Heating Elements as required. Please contact us for more details. Get a Quote Now! For other ceramic materials, please check our Ceramics catalog page.
Pyrolytic Boron Nitride (PBN) Typical Specification
Properties | Units | Values |
Density | g/cm3 | 1.95-2.20 |
Bending Strength | MPa | 173 |
Compression Strength | MPa | 154 |
Thermal Conductivity | W/m°C | “a” 60 “c” 2 |
Resistivity | Ω·cm | 1.7~2×1015 |
Total Impurities | ppm | <100 |
Order Information
Inquiries and orders should include the following information:
- Quantity
- Dimensions or drawings
- Resistivity
Packing and Storage
Standard Packing: Sealed bags in carton boxes. Special package is available on request.