Nickel Vanadium Sputtering Target
Product | Nickel Vanadium Sputtering Target (Ni/V Target) |
Part Number | SP28-2 |
Nickel Vanadium (Ni/V) Alloy is non-magnetic, which is conducive to magnetron sputtering. In the electronic and information industry, it is gradually replacing the pure nickel sputtering target.
Pure gold is usually used as the surface conductive layer in IC fabrication. However, Au-Si low melting point compound is easy to form between gold and silicon crystal circle, which leads to the weak bonding between gold and silicon. It is proposed to add a bonding layer on the surface of gold and silicon wafers. Pure nickel is commonly used as bonding layer. However, diffusion will be formed between nickel layer and gold conductive layer. Therefore, another barrier layer is needed to prevent gold conductive layer and nickel bonding layer. The barrier layer should be made of metal with high melting point and high current density. Therefore, nickel sputtering target, vanadium sputtering target and gold sputtering target will be used in IC production.
Nickel vanadium sputtering target material is made by adding vanadium into nickel melt in the process of preparing nickel vanadium and gold, which makes the prepared alloy more conducive to magnetron sputtering. Combining the advantages of nickel sputtering target and vanadium sputtering target, sputtering nickel layer (bonding layer) and vanadium layer (barrier layer) can be completed at one time.
NCE can provide the Nickel Vanadium Alloy Sputtering Target (Ni/V Target) with different sizes available on request. Please contact us for more details. Get a Quote Now! For other sputtering targets, please check our Sputtering Targets catalog page.
Typical Applications:
Nickel Vanadium Sputtering Target is mainly used in semiconductor and microelectronics industry. It’s used in the integrated circuit manufacturing.
Typical Specification
Material: | Nickel Vanadium (Ni/V) |
Typical: | Ni/V, 93/7 wt% |
Purity: | 99.9%, 99.99% |
Type: | Planar target |
Shape: | Discs, plates, step targets, custom work |
Typical Dimension: | Diameter: 1”, 2”, 3”, 4”; Thickness: 0.125”, 0.2”, 0.25” |
∗ Custom-work dimensions or special requirements are available.
Order Information
Inquiries and orders should include the following information:
- Quantity
- Dimensions or drawings
Packing and Storage
Standard Packing: Packed in sealed bags with labels. Items will be packed properly to avoid damage during transit.
Storage: Store in dry environment, sealed packages. Handle with care, prevent pressure and collision.
Note: Before using, observe whether the surface is clean. Wear clean gloves to operate. Avoid direct contact with materials by hand and avoid contamination by oil and other things.