Aluminum Oxide Sputtering Target
| Product | Aluminum Oxide Sputtering Target (Al2O3 Target) |
| Part Number | SP13-02 |
| CAS Number | 1344-28-1 |
Aluminum Oxide (Al2O3), amphoteric oxide, can be dissolved in inorganic acids and alkaline solutions, but almost insoluble in water and non-polar organic solvents. Aluminum oxide is commonly used as an analytical reagent, a dehydration of organic solvent, an adsorbent, an organic reaction catalyst, a grinding agent, a polishing agent, a raw material for smelting aluminum and refractory materials.
High Purity Aluminum Oxide has the characteristics of corrosion resistance, high temperature resistance, high hardness, high strength, wear resistance, oxidation resistance, good insulation, and large surface area. It is insoluble in water, slightly soluble in strong acid and alkali solution, and can be eroded by hydrofluoric acid and potassium bisulfate. The advantages of high-purity ultra-fine alumina include: high purity, small particle size, high density, high-temperature strength, corrosion resistance, and easy sintering.
NCE can provide the Aluminum Oxide (Al2O3) Sputtering Target with different sizes available on request. Please contact us for more details. Get a Quote Now! For other sputtering targets, please check our Sputtering Targets catalog page.
Typical Applications:
Aluminum Oxide is widely used in bioceramics, fine ceramics, chemical catalysts, rare earth trichromatic phosphors. Applications: antireflection film, multilayer film, anti reflection film, eyeglass film, and protective film.
Typical Specification
| Material: | Aluminum Oxide (Al2O3) |
| Purity: | 99.99% |
| Sputter: | RF Sputtering |
| Type of Bond: | Indium, Elastomer |
| Shape: | Discs, plates, step targets, custom work |
| Typical Dimension: | Diameter: 1”, 2”, 3”, 4”; Thickness: 0.125”, 0.2”, 0.25” |
∗ Special requirements are available. Please review the sputtering gun manual to confirm the target shape and size.
Order Information
Inquiries and orders should include the following information:
- Quantity
- Dimensions or drawings
- Bonding service or not. (Bonding recommended)
Packing and Storage
Standard Packing: Packed in sealed bags with labels. Items will be packed properly to avoid damage during transit.
Storage: Store in dry environment, sealed packages. Handle with care, prevent pressure and collision.
Note:
- Before using, observe whether the surface is clean. Wear clean gloves to operate. Avoid direct contact with materials by hand and avoid contamination by oil and other things.
- Indium bonding: max. operating temperature 150°C; Elastomer bonding: max. operating temperature 250°C.
Physical Properties
| Symbol: | Al2O3 |
| Color: | White |
| Melting Point: | 2045 °C |
| Boiling Point: | 2980°C |
| Density: | 3.97 g/cm3 |
| Melting Heat: | 17.48 kJ·mol-1 |
| Evaporation temperature: | 1800 °C |
| Evaporation mode: | electron beam |
| Transparent range: | 200-7000 nm |
| Refractive Index n (wavelength, nm) at 40°C: | 1.59 (600) / 1.56 (1600) |
| Refractive Index n (wavelength, nm) at 300°C: | 1.62 (600) / 1.59 (1600) |
| Evaporation source material: | W, Mo |
