Aluminum Nitride Sputtering Target

Aluminum Nitride Sputtering Target
Product Aluminum Nitride Sputtering Target (AlN Target)
Part Number SP13-03
CAS Number 24304-00-5

Aluminum Nitride (AlN) is a covalent-bond compound and an atomic crystal. It belongs to diamond-like nitrides, with the hexagonal system and the wurtzite type crystal structure. It is non-toxic, white or gray white.

AlN can be stabilized up to 2200°C. The strength at room temperature is high, and the strength decreases slowly with the increase of temperature. It has good thermal conductivity and small coefficient of thermal expansion, so it is a good thermal shock resistant material. It is an ideal crucible material for melting and casting pure iron, aluminum or aluminum alloy. AlN is also an electrical insulator with good dielectric properties. It is also promising to be used as electrical components. AlN coating on GaAs surface can protect it from ion implantation during annealing.

NCE can provide the Aluminum Nitride (AlN) Sputtering Target with different sizes available on request. Please contact us for more details. Get a Quote Now! For other sputtering targets, please check our Sputtering Targets catalog page.

Typical Applications:

Aluminum Nitride (AlN) target material is suitable for industrial coating, experimental or research grade targets, and electronic, photoelectric, military, decorative and functional film, etc.

Typical Specification

Material: Aluminum Nitride (AlN)
Purity: 99.5%
Sputter: RF Sputtering
Type of Bond: Elastomer
Shape: Discs, plates, step targets, custom work
Typical Dimension: Diameter: 1”, 2”, 3”, 4”; Thickness: 0.125”, 0.2”, 0.25”

∗ Special requirements are available. Please review the sputtering gun manual to confirm the target shape and size.

Order Information

Inquiries and orders should include the following information:

  1. Quantity
  2. Dimensions or drawings
  3. Bonding service or not. (Bonding recommended)

Packing and Storage

Standard Packing: Packed in sealed bags with labels. Items will be packed properly to avoid damage during transit.

Storage: Store in dry environment, sealed packages. Handle with care, prevent pressure and collision.

Note:

  1. Before using, observe whether the surface is clean. Wear clean gloves to operate. Avoid direct contact with materials by hand and avoid contamination by oil and other things.
  2. Indium bonding: max. operating temperature 150°C; Elastomer bonding: max. operating temperature 250°C.

Physical Properties

Symbol: AlN
Color: White
Melting Point: 2200°C
Density: 3.26 g/cm3